Methods of forming pluralities of capacitors, and integrated circuitry

ABSTRACT

A method of forming a plurality of capacitors includes providing a plurality of capacitor electrodes comprising sidewalls. The plurality of capacitor electrodes are supported at least in part with a retaining structure which engages the sidewalls, with the retaining structure comprising a fluid pervious material. A capacitor dielectric material is deposited over the capacitor electrodes through the fluid pervious material of the retaining structure effective to deposit capacitor dielectric material over portions of the sidewalls received below the retaining structure. Capacitor electrode material is deposited over the capacitor dielectric material through the fluid pervious material of the retaining structure effective to deposit capacitor electrode material over at least some of the capacitor dielectric material received below the retaining structure. Integrated circuitry independent of method of fabrication is also contemplated.

TECHNICAL FIELD

This invention relates to methods of forming pluralities of capacitors,and to integrated circuitry.

BACKGROUND OF THE INVENTION

Capacitors are one type of component which is commonly used in thefabrication of integrated circuits, for example in DRAM circuitry. Atypical capacitor is comprised of two conductive electrodes separated bya non-conducting dielectric region. As integrated circuitry density hasincreased, there is a continuing challenge to maintain sufficiently highstorage capacitance despite typical decreasing capacitor area. Theincrease in density of integrated circuitry has typically resulted ingreater reduction in the horizontal dimension of capacitors as comparedthe vertical dimension. In many instances, the vertical dimension ofcapacitors has increased.

One manner of forming capacitors is to initially form an insulativematerial within which a capacitor storage node electrode is formed. Forexample, an array of capacitor electrode openings for individualcapacitors is typically fabricated in such insulative capacitorelectrode-forming material, with a typical insulative electrode-formingmaterial being silicon dioxide doped with one or both of phosphorus andboron. The capacitor electrode openings are typically formed by etching.However, it can be difficult to etch the capacitor electrode openingswithin the insulative material, particularly where the openings aredeep.

Further and regardless, it is often desirable to etch away most if notall of the capacitor electrode-forming material after individualcapacitor electrodes have been formed within the openings. Such enablesouter sidewall surfaces of the electrodes to provide increased area, andthereby increased capacitance for the capacitors being formed. However,the capacitor electrodes formed in deep openings are typicallycorrespondingly much taller than they are wide. This can lead totoppling of the capacitor electrodes either during the etch to exposethe outer sidewall surfaces, during transport of the substrate, and/orduring deposition of the capacitor dielectric layer or outer capacitorelectrode layer. Our U.S. Pat. No. 6,667,502 teaches provision of abrace or retaining structure intended to alleviate such toppling.

While the invention was motivated in addressing the above identifiedissues, it is in no way so limited. The invention is only limited by theaccompanying claims as literally worded, without interpretative or otherlimiting reference to the specification, and in accordance with thedoctrine of equivalents.

SUMMARY

The invention comprises methods of forming pluralities of capacitors,and comprises integrated circuitry independent of method of fabrication.In one implementation, a method of forming a plurality of capacitorsincludes providing a plurality of capacitor electrodes comprisingsidewalls. The plurality of capacitor electrodes is supported at leastin part with a retaining structure which engages the sidewalls, with theretaining structure comprising a fluid pervious material. A capacitordielectric material is deposited over the capacitor electrodes throughthe fluid pervious material of the retaining structure effective todeposit capacitor dielectric material over portions of the sidewallsreceived below the retaining structure. Capacitor electrode material isdeposited over the capacitor dielectric material through the fluidpervious material of the retaining structure effective to depositcapacitor electrode material over at least some of the capacitordielectric material received below the retaining structure.

In one implementation, a method of forming a plurality of capacitorsincludes depositing a first material over a substrate. A fluid perviousmaterial is deposited over the first material, with the first materialbeing selectively etchable relative to the fluid pervious material. Aplurality of spaced capacitor electrode openings is formed into thefirst and fluid pervious materials. A plurality of capacitor electrodesis formed within the openings. After forming the plurality of capacitorelectrodes, an etching fluid is flowed through the fluid perviousmaterial effective to selectively etch first material relative to thefluid pervious material and effective to expose outer lateral sidewallsof the capacitor electrodes below the fluid pervious material. After theselective etch, capacitor dielectric material and capacitor electrodematerial are deposited over at least some of the outer lateral sidewallsbelow the fluid pervious material exposed by the selective etch.

In one implementation, integrated circuitry comprises a plurality ofspaced, elongated and upright capacitor electrodes received over asubstrate and supported at least in part by a sidewall retainingstructure. The sidewall retaining structure comprises a fluid perviousmaterial.

In one implementation, integrated circuitry comprises a plurality ofspaced, elongated and upright capacitor electrodes received over asubstrate and supported at least in part by a sidewall retainingstructure. The sidewall retaining structure comprises at least one ofnanowhiskers and nanotubes.

Other implementations and aspects are contemplated.

BRIEF DESCRIPTION OF THE DRAWINGS

Preferred embodiments of the invention are described below withreference to the following accompanying drawings.

FIG. 1 is a diagrammatic cross section of a substrate fragment inprocess in accordance with an aspect of the invention.

FIG. 2 is a view of the FIG. 1 substrate at a processing step subsequentto that shown by FIG. 1.

FIG. 3 is a view of the FIG. 2 substrate at a processing step subsequentto that shown by FIG. 2.

FIG. 4 is a view of the FIG. 3 substrate at a processing step subsequentto that shown by FIG. 3.

FIG. 5 is a view of the FIG. 4 substrate at a processing step subsequentto that shown by FIG. 4.

FIG. 6 is a diagrammatic top plan view of the FIG. 5 substrate.

FIG. 7 a view of the FIG. 6 substrate at a processing step subsequent tothat shown by FIG. 6.

FIG. 8 is a view of the FIG. 5 substrate at a processing step subsequentto that shown by FIG. 5.

FIG. 9 is a view of the FIG. 8 substrate at a processing step subsequentto that shown by FIG. 8.

FIG. 10 is a diagrammatic cross section of an alternate embodimentsubstrate fragment in process in accordance with an aspect of theinvention.

FIG. 11 is a diagrammatic cross section of another alternate embodimentsubstrate fragment in process in accordance with an aspect of theinvention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

This disclosure of the invention is submitted in furtherance of theconstitutional purposes of the U.S. Patent Laws “to promote the progressof science and useful arts” (Article 1, Section 8).

Integrated circuitry and methods of forming pluralities of capacitors inaccordance with exemplary preferred embodiments of aspects of theinvention are described with reference to FIGS. 1-11. Referringinitially to FIG. 1, a wafer fragment is indicated generally withreference numeral 10, and in one preferred implementation comprises asemiconductor substrate. In this document, “semiconductive substrate” or“semiconductor substrate” is defined to mean any construction comprisingsemiconductive material, including, but not limited to, bulksemiconductive materials such as a semiconductive wafer (either alone orin assemblies comprising other materials thereon), and semiconductivematerial layers (either alone or in assemblies comprising othermaterials). The term “substrate” refers to any supporting structure,including, but not limited to, the semiconductive substrates describedabove. By way of example only, substrate fragment 10 is depicted ascomprising some insulator layer 12 having a plurality of conductivecontact plugs 14, 15 and 16 formed therein for electrical connectionwith respect to capacitor electrodes of a plurality of capacitors beingformed, as will be apparent from the continuing discussion. Insulativematerial 12 would overlie other substrate material (not shown), forexample bulk monocrystalline silicon, semiconductor-on-insulatorcircuitry, or other substrate material (of course including one or aplurality of materials) whether existing or yet-to-be developed. Furtherand by way of example only, an etch stop layer (not shown) might bereceived over constructions 12/14/15/16, as a part of material 12,and/or proximate the upper portions of constructions 14/15/16.Conductive plugs 14, 15 and 16 will comprise one or more conductivematerials including, for example and by way of example only,conductively doped semiconductive material. Material 12 might compriseany suitable insulator material, for example one or more silicondioxides, silicon nitrides, and/or other materials, and of coursewhether existing or yet-to-be developed. Substrate 12/14/15/16,isexemplary only, and any substrate is contemplated.

A first material 18 has been deposited over substrate 12/14/15/16. Firstmaterial 18 might be conductive, insulative or semiconductive, with aninsulative material being preferred. By way of example only, exemplarypreferred materials include silicon dioxides, for example doped silicondioxides, and including boron and phosphorus-doped silicon dioxides(i.e., PSG, BSG, and/or BPSG, and spin-on-glasses). An exemplarypreferred thickness range for layer 18 is from 5,000 Angstroms to 10,000Angstroms.

In one implementation, a fluid pervious material 20 has been depositedover first material 18, and preferably on first material 18 (with “on”in this document meaning in at least some direct physical contacttherewith). An exemplary preferred thickness range for fluid perviousmaterial 20 is from 500 Angstroms to 1,000 Angstroms. In oneimplementation, fluid pervious material 20 is characterized by beingdifferent from first material 18 and such that first material 18 isselectively etchable relative to fluid pervious material 20. In thecontext of this document, a material which is selectively etchablerelative to another requires capability of a selective etch rate of atleast 10:1 of removal rate of the one material relative the anothermaterial.

Further in the context of this document, a “fluid pervious material” isany material through which a fluid (or course, including reactive gases)can be caused indiscriminately to flow without any required patterningor selective deposit of such material over a substrate to enable suchflow therethrough (although such might selectively deposit, or besubsequently patterned). Such fluid pervious material might beinherently fluid pervious as-deposited, or rendered fluid pervious afterdeposition such that fluid can flow through such material. However, afluid pervious material herein does not include a material which is notfluid pervious as-deposited but subsequently allows fluid flow only upona subsequent patterning of a mask followed by subsequent etch of allunmasked portions such that fluid permeability therethrough results onlyfrom fluid flow around patterned islands or patterned isolated regionsof such material. By way of example only, exemplary preferred fluidpervious materials comprise cellular solids, for example comprising anassembly of prismatic or polyhedral cells having solid edges and facespackaged together to fill space. For example, such cellular solidmaterial might comprise a honeycomb or comprise a foam and include, byway of example only, cellular metals, cellular ceramics, aluminum andother metal foams, glasses, polymers, etc. Further and regardless, inone preferred implementation, the fluid pervious material is porous, andeven more preferably nanoporous. In the context of this document, “nano”as a word prefix denotes average size on the order of less than or equalto 100 nanometers. Accordingly, a “nanoporous” material has overallaverage pore size of 1000 Angstroms or less. Exemplary preferred fluidpervious materials are low k materials, and as well silk fibroinmaterial, and porous SiLK™ available from Dow Chemical.

In one preferred implementation, fluid pervious material 20 comprisesnanowhiskers, with “nanowhiskers” being synonymous with and common tonanowires and nanorods. Such are nano-scale in diameter, can reach tensof microns in length, and can be grown from a variety of differentmaterials, as known by people of skill in the art. By way of exampleonly, exemplary nanowhisker material includes Si₃N₄, Si, Ge, SiC, B₄C,GaN, B, TiO_(x), and metal carbides. Further by way of example only, thefluid pervious material might comprise nanotubes, by way of example onlycarbon nanotubes. Of course, the fluid pervious material might comprisea combination of nanowhiskers and nanotubes, and/or combinations of theabove variously stated materials, and other materials. For example andby way of example only, one preferred manner of providing nanowhiskersand/or nanotubes would be to provide one or both of nanowhiskers andnanotubes within a spin-on-glass solution. Such solution would bedeposited over first material 18. Such solution would be solidified intoan exemplary material 20 comprising spin-on-glass and one or both ofnanowhiskers and nanotubes.

Further and regardless, fluid pervious material 20 will effectivelydefine or have fluid passageways essentially extending therethrough toallow fluid to pass from one side of material 20 to the other. By way ofexample only, such are diagrammatically depicted with numerals 21 inFIG. 1. Also by way of example only, such might comprise interconnectedpores or other small interconnected chambers or channels whichserpentine from one surface of material 20 to the other. Further,collectively such may be of substantially common or varying opencross-sectional shape and dimensions across material 20, and/or ofcommon or varying open cross- sectional shape of an individualpassageway 21. Such can be substantially vertically oriented orperpendicular relative to the expanse of material 20 as diagrammaticallyshown. In one preferred implementation, at least a majority of suchfluid passageways within fluid pervious material 20 have average opencross-sectional dimensions for fluid flow therethrough which are nogreater than 400 Angstroms, and in one preferred embodiment no greaterthan 200 Angstroms. Preferably, at least the same majority of fluidpassageways within fluid pervious material 20 have average opencross-sectional dimensions of at least 50 Angstroms. By way of exampleonly, exemplary preferred ranges for said open cross-sectionaldimensions are from 100 Angstroms to 400 Angstroms, from 100 Angstromsto 300 Angstroms, and from 100 Angstroms to 200 Angstroms.

Still referring to FIG. 1, a second material 22 has been deposited overfluid pervious material 20, and preferably on fluid pervious material 20as shown. Second material 22 is preferably characterized as beingselectively etchable relative to fluid pervious material 20, and therebydifferent therefrom. First material 18 and second material 22 might bethe same (meaning identical composition) or different materials. Furtherfor example if different, such might both comprise oxides, for exampleany combinations of doped or undoped oxides including PSG, BSG, BPSG,and spin-on-glasses, by way of example only. Further of course by way ofexample only, materials 18 and 22 might comprise the same oxide. Anexemplary preferred thickness range for second material 22 is from 5,000Angstroms to 15,000 Angstroms. An exemplary preferred compositethickness range for materials 18, 20 and 22 in combination in FIG. 1 isfrom 10,000 Angstroms to 25,000 Angstroms. Further and regardless,second material 22 might fill at least some portion of some of fluidpassageways 21, might fill substantially all of at least some of fluidpassageways 21, or substantially fill all of at least a majority ofpassageways 21 (not shown).

Referring to FIG. 2, a plurality of spaced capacitor electrode openings24, 26 and 28 have been formed into first, fluid pervious, and secondmaterials 18, 20 and 22, respectively. An exemplary preferred techniquefor the same is by photolithographic patterning and subsequentanisotropic chemical etching. Of course in the depicted preferredimplementation, etching chemistry will likely need to be changed atleast twice when switching from etching material 22 to etching material20, and again when subsequently etching material 18. Regardless, it islikely (but not required) that the number of passageways/pores/etc.intermediate adjacent of the openings might be greater in number thanthat shown in the drawings, with three being shown between adjacent ofthe openings for clarity in the figures.

Referring to FIG. 3, a plurality of capacitor electrodes 30, 32 and 34have been formed within openings 24, 26 and 28. In the depictedpreferred embodiment, individual of such capacitor electrodesrespectively comprise a respective container shape. By way of exampleonly, an exemplary preferred material for capacitor electrodes 30, 32and 34 is conductively doped polysilicon. An exemplary manner of formingthe same is by polysilicon deposition followed by maskless chemicalmechanical polishing to form the depicted isolated capacitor electrodes30, 32 and 34. Such are depicted as having sidewalls 35 and 37, withsidewalls 37 comprising inner container sidewalls and sidewalls 35comprising outer lateral sidewalls. Of course and by way of exampleonly, but less preferred, openings 24, 26 and 28 might be completelyfilled with capacitor electrode material such that an individualelectrode is more of a filled-in pillar shape than a container shape,and perhaps void of inner container sidewalls 37. Further andaccordingly in the depicted example, at least sidewalls 35 of capacitorelectrodes 30, 32 and 34 are depicted as including portions receivedboth above and below fluid pervious material 20.

Referring to FIG. 4, second material 22 has been etched selectivelyrelative to fluid pervious material 20 effective to expose outer lateralsidewalls 35 of capacitor electrodes 30, 32 and 34 received above fluidpervious material 20.

Referring to FIG. 5, an etching fluid has been flowed through fluidpervious material 20 effective to selectively etch first material 18relative to fluid pervious material 20 and effective to expose outerlateral sidewall 35 of capacitor electrodes 30, 32 and 34 received belowfluid pervious material 20. Of course if first material 18 and secondmaterial 22 are the same or at least capable of being etched with thesame chemistry selectively relative to fluid pervious material 20, theprocessing of FIG. 5 could be a continuing of the etching of FIG. 4, forexample utilizing the same etching chemistry and etching fluid, and forexample in a single common continuous etching step. In one preferredmethodical aspect of the invention, fluid pervious material 20 supportscapacitor electrodes 30, 32 and 34 upright during the selective etch ofat least first material 18.

In one implementation of an aspect of the invention, a method of forminga plurality of capacitors comprises providing a plurality of capacitorelectrodes comprising sidewalls. Such plurality of capacitor electrodesare supported at some point at least in part with a retaining structurewhich engages the sidewalls and comprises a fluid pervious material. Forexample and by way of example only, FIG. 5 depicts such an exemplaryretaining structure in the form of remnant material 20. Such retainingstructure 20 in the depicted embodiment is formed of a single layer ofmaterial. Of course, multiple layers of materials might be utilizedwhether contacting one another or not. For example and by way of exampleonly, the retaining structure might comprise multiple spaced layers ofmaterial 20. Further by way of example only, the preceding discussionwith reference to FIGS. 1-4 provides only exemplary methods of formingsuch plurality of capacitor electrodes and supporting such at least inpart with a retaining structure which engages (not necessarily directlycontacting) the capacitor electrode sidewalls. However, the structure ofFIG. 5, or any other structure as just so stated, in a method ofsupporting with a retaining structure as just so stated are alsocontemplated.

As described above, fluid pervious material 20 might be inherently fluidpervious as-deposited, or rendered fluid pervious after deposition. Forexample and by way of example only, any of the above preferredmaterials, for example foams, honeycombs and/or other materials, mightbe deposited in a manner which provides fluid permeability therethroughimmediately upon formation. Alternately by way of example only,processing might be provided subsequently to a deposited material 20 torender it fluid pervious. For example and by way of example only, asuitably thin silicon nitride or other layer might be physicallybombarded with ions or suitably small solid material to createindiscriminate perforations (for example, much like bullet holes)through material 20 to render such material indiscriminately fluidpervious while retaining continuity of material as a continuouspreferred retaining structure or support in the preferred processing asdescribed above.

Further and regardless, the invention contemplates an increasing ofdegree of fluid permeability of at least some of the fluid perviousmaterial from its as-deposited state. In one exemplary implementation,such might be done to different degrees relative to different regions.For example in one aspect, the invention contemplates increasing, fromthe as-deposited state, the degree of fluid permeability of firstregions of fluid pervious material that are spaced farther from thesidewalls of the capacitor electrodes as compared to second regions offluid pervious material that are spaced closer to the capacitorelectrode sidewalls. By way of example only, such is depicted withreference to FIGS. 6 and 7. FIG. 6 diagrammatically depicts a top viewof FIG. 5 showing an exemplary degree of porosity and/or fluidpassageway density and average diameter of fluid pervious material 20as-deposited. Such can be considered as depicting exemplary secondregions 40 of fluid pervious material that are spaced more proximate orcloser to sidewalls 35 of the capacitor electrodes as compared to firstregions 42 which are comparatively spaced further from sidewalls 35 ofthe capacitor electrodes.

FIG. 7 depicts subsequent processing whereby fluid passageways 21 withinregions 42 have been widened on average as compared to fluid passageways21 within regions 40 on average, thereby increasing the degree of fluidpermeability of material 20 within first regions 42 as compared tosecond regions 40. An exemplary manner of producing the FIG. 7construction as compared to that of FIG. 6 is by suitable plasmaetching, which will tend to inherently preferentially widen pores orpassageways spaced further from sidewalls 35 of adjacent structures thanthose which are placed closer to such structures.

Referring to FIG. 8, a capacitor dielectric material 50 has beendeposited over at least some of outer lateral sidewalls 35 above andbelow fluid pervious material 20. In one preferred implementation,capacitor dielectric material 50 has at least been deposited overcapacitor electrodes 30, 32 and 34 through fluid pervious material 20 ofthe FIG. 5 depicted retaining structure 20 effective to depositcapacitor dielectric material 50 at least over portions of the capacitorsidewalls which are received below the retaining structure. Furtherlikely, unless deposition conditions were selected that would beselective to not deposit material 50 onto retaining structure/fluidpervious material 20, capacitor dielectric material 50 would alsodeposit onto material 20, and most likely within the fluid passagewayseffectively formed therethrough, and as shown. An exemplary preferredmaterial 50 is aluminum oxide, with an exemplary preferred thickness formaterial 50 being 40 Angstroms. Minimum passageway size in material 20is preferably selected to be greater than two times the depositionthickness of material 50 at least to preclude occlusion of suchpassageways with the depositing capacitor dielectric material to enablesuch material to deposit onto sidewalls of the electrodes below fluidpervious material 20. For example, and by way of example only, apreferred minimum open cross-dimension for passageways 21 for a 40Angstrom thick capacitor dielectric layer 50 is 120 Angstroms. Of coursealternately by way of example only, non-uniform minimum cross-dimensionfluid passageways might be provided in fluid pervious material 20.Further for example and by way of example only and with respect to theFIG. 7 depiction, deposited capacitor dielectric material 50 might blockor occlude fluid permeability in at least a majority, if not all, ofsecond regions 40 and not do so in at least a majority, and perhaps innone, of first regions 42.

Referring to FIG. 9, capacitor electrode material 55 has been depositedover at least some of outer lateral sidewalls 35 above and below fluidpervious material 20, and accordingly in one preferred implementation atleast over at least some of capacitor dielectric material 50 receivedbelow retaining structure 20. Material 55 will ultimately be conductive,and may constitute the same or different material(s) from that of firstcapacitor electrodes 30, 32 and 34. Second capacitor electrode material55 might be patterned to form individual second capacitor electrodes forthe depicted first capacitor electrodes, or alternately by way ofexample only comprise a single common capacitor electrode for all of thedepicted capacitors, as is common in DRAM circuitry for example. Furtherand regardless, retaining structure/fluid pervious material 20 might ormight not remain as part of a finished integrated circuitry constructionincorporating the plurality of capacitors, with such being depicted asremaining as part of such construction in FIG. 9.

The above exemplary preferred embodiment depicts retaining structure 20in FIG. 5, for example, as not being received within container openingsof the preferred container shapes. By way of example only in a lesserpreferred embodiment, the invention contemplates providing of theretaining structure within container openings of a container shape. Forexample and by way of example only, FIG. 10 depicts an alternateembodiment substrate fragment 10 a as compared to that depicted in FIG.5. Like numerals from the first-described embodiment are utilized whereappropriate, with differences being indicated with the suffix “a” orwith different numerals. FIG. 10 depicts a retaining structure/fluidpervious material 20 a having portions received within the depictedcontainer electrodes 30, 32 and 34. Typically, such would preferably beprovided, at least in part, after forming capacitor electrodes 30, 32and 34.

The above-described preferred embodiments also depict the formation ofboth of first and second materials 18 and 22. By way of example only,FIG. 11 depicts an alternate embodiment substrate fragment 10 b. Likenumerals from the first-described embodiments are utilized whereappropriate, with differences being indicated with the suffix “b” orwith different numerals. FIG. 11 depicts a processing and constructionvoid of second material 22, whereby a thicker first layer 18 b has beenprovided prior to the deposition of a fluid pervious material/retainingstructure 20 b.

Aspects of the invention also contemplate integrated circuitryindependent or regardless of the above-described methods of fabrication.In one implementation, such integrated circuitry comprises a pluralityof spaced, elongated and upright first capacitor electrodes receivedover a substrate and supported at least in part by a sidewall retainingstructure. By way of example only, capacitor electrodes 30, 32 and 34are an exemplary depiction of preferred such capacitor electrodes.Further by way of example only in such exemplary implementation,retaining structure 20 is an exemplary such sidewall retainingstructure. In such implementation, the sidewall retaining structurecomprises a fluid pervious material. Preferred materials and otherattributes are otherwise as described above with all the respectivedescribed and depicted embodiments.

Aspects of the invention also contemplate methods of forming a pluralityof capacitors independent or regardless of the use of fluid perviousmaterials or layers. In one exemplary such implementation and aspect,such an implementation comprises depositing a first material over asubstrate. By way of example only, all aspects associated with firstmaterial 18/18 b described above apply. A support material comprising atleast one of nanotubes and nanowhiskers is deposited over the firstmaterial, and whereby the first material is selectively etchablerelative to the support material and, as just stated, independent ofwhether the support material is fluid pervious. Exemplary preferrednanotube and nanowhisker material and attributes are otherwise asdescribed above.

A plurality of spaced capacitor electrode openings is formed into thefirst and support materials and a plurality of capacitor electrodes isformed within the openings, for example as described above. Afterforming the plurality of capacitor electrodes, the first material isetched selectively relative to the support material effective to exposethe outer lateral sidewalls of the capacitor electrodes below thesupport material and leaving at least some of such support material atleast in part supporting the plurality of capacitors, for example asdescribed in the above embodiments and and/but independent of whetherthe support material is fluid pervious. Capacitor dielectric materialand capacitor electrode material are thereafter deposited over at leastsome of the outer lateral sidewalls below the support material exposedby the etching. Such a method in one aspect also contemplates theutilization of first and second materials below and above, respectively,the support material as described in the above exemplary preferredembodiments and independent of whether the support material is fluidpervious.

Further in one implementation, the invention contemplates integratedcircuitry independent or regardless of the presence of fluid perviousmaterial. In such implementation, such integrated circuitry comprises aplurality of spaced, elongated and upright capacitor electrodes receivedover a substrate and supported at least in part by a sidewall retainingstructure where such structure comprises at least one of nanowhiskersand nanotubes independent of fluid permeability through nanowhiskerand/or nanotube material. Preferred attributes are otherwise as describeabove, by way of example only.

In compliance with the statute, the invention has been described inlanguage more or less specific as to structural and methodical features.It is to be understood, however, that the invention is not limited tothe specific features shown and described, since the means hereindisclosed comprise preferred forms of putting the invention into effect.The invention is, therefore, claimed in any of its forms ormodifications within the proper scope of the appended claimsappropriately interpreted in accordance with the doctrine ofequivalents.

1. A method of forming a plurality of capacitors, comprising: providinga plurality of capacitor electrodes comprising sidewalls; supporting theplurality of capacitor electrodes at least in part with a retainingstructure which engages the sidewalls, the retaining structurecomprising a fluid pervious material; depositing a capacitor dielectricmaterial over the capacitor electrodes through the fluid perviousmaterial of the retaining structure effective to deposit capacitordielectric material over portions of the sidewalls received below theretaining structure; and depositing capacitor electrode material overthe capacitor dielectric material through the fluid pervious material ofthe retaining structure effective to deposit capacitor electrodematerial over at least some of the capacitor dielectric materialreceived below the retaining structure.
 2. The method of claim 1 whereinindividual of the capacitor electrodes comprises a container shape. 3.The method of claim 2 wherein the retaining structure is not receivedwithin container openings of the container shape, and said sidewallscomprise outer lateral sidewalls.
 4. The method of claim 2 wherein theretaining structure is received within container openings of thecontainer shape.
 5. The method of claim 1 wherein the sidewalls of thecapacitor electrodes include portions received above the retainingstructure.
 6. The method of claim 1 wherein the supporting structurecomprises depositing the fluid pervious material, the fluid imperviousmaterial being inherently fluid pervious as-deposited.
 7. The method ofclaim 1 wherein the supporting structure comprises depositing the fluidpervious material, and further comprising increasing degree of fluidpermeability of at least some of the fluid pervious material from itsas-deposited state.
 8. The method of claim 7 comprising increasing, fromas-deposited state, degree of fluid permeability of first regions offluid pervious material that are spaced farther from the sidewalls ascompared to second regions of fluid pervious material that are spacedcloser to the sidewalls.
 9. The method of claim 8 wherein the capacitordielectric material deposits onto the retaining structure, the capacitordielectric material blocking fluid permeability in at least a majorityof the second regions but not in a majority of the first regions. 10.The method of claim 1 wherein at least a majority of fluid passagewayswithin the fluid pervious material have average open cross sectionaldimensions no greater than 400 Angstroms.
 11. The method of claim 1wherein at least a majority of fluid passageways within the fluidpervious material have average open cross sectional dimensions nogreater than 200 Angstroms.
 12. The method of claim 1 wherein at least amajority of fluid passageways within the fluid pervious material haveaverage open cross sectional dimensions of from 50 Angstroms to 400Angstroms.
 13. The method of claim 1 wherein at least a majority offluid passageways within the fluid pervious material have average opencross sectional dimensions of from 100 Angstroms to 300 Angstroms. 14.The method of claim 1 wherein the capacitor dielectric material depositsonto the retaining structure.
 15. The method of claim 1 wherein thecapacitor electrode material deposits onto the retaining structure. 16.The method of claim 1 wherein the retaining structure remains as part ofa finished integrated circuitry construction incorporating the pluralityof capacitors.
 17. The method of claim 1 wherein the fluid perviousmaterial comprises a cellular solid.
 18. The method of claim 17 whereinthe cellular solid comprises a honeycomb.
 19. The method of claim 17wherein the cellular solid comprises a foam.
 20. The method of claim 1wherein the fluid pervious material is porous.
 21. The method of claim20 wherein the fluid pervious material is nanoporous.
 22. The method ofclaim 20 wherein the fluid pervious material is low k.
 23. The method ofclaim 1 wherein the fluid pervious material comprises nanowhiskers. 24.The method of claim 1 wherein the fluid pervious material comprisesnanotubes.
 25. The method of claim 1 wherein the fluid pervious materialcomprises a spin-on-glass having nanowhiskers received therein.
 26. Themethod of claim 1 wherein the fluid pervious material comprises aspin-on-glass having nanotubes received therein.
 27. A method of forminga plurality of capacitors, comprising: providing a plurality ofcapacitor electrodes comprising sidewalls, portions of the sidewallsbeing received above and below the retaining structure; supporting theplurality of capacitor electrodes at least in part with a depositedretaining structure which engages the sidewalls, the retaining structurecomprising a fluid pervious material which is inherently fluid perviousas-deposited, at least a majority of fluid passageways within the fluidpervious material having average open cross sectional dimensions nogreater than 400 Angstroms; depositing a capacitor dielectric materialover the capacitor electrodes through the fluid pervious material of theretaining structure effective to deposit capacitor dielectric materialover portions of the sidewalls received below the retaining structure,the capacitor dielectric material depositing onto the retainingstructure; and depositing capacitor electrode material over thecapacitor dielectric material through the fluid pervious material of theretaining structure effective to deposit capacitor electrode materialover at least some of the capacitor dielectric material received belowthe retaining structure, the retaining structure remaining as part of afinished integrated circuitry construction incorporating the pluralityof capacitors.
 28. The method of claim 27 wherein at least a majority offluid passageways within the fluid pervious material have average opencross sectional dimensions of from 100 Angstroms to 300 Angstroms. 29.The method of claim 27 comprising increasing degree of fluidpermeability of at least some of the fluid pervious material from itsas-deposited state.
 30. The method of claim 27 comprising increasing,from as-deposited state, degree of fluid permeability of first regionsof fluid pervious material that are spaced farther from the sidewalls ascompared to second regions of fluid pervious material that are spacedcloser to the sidewalls.
 31. The method of claim 30 wherein thecapacitor dielectric material blocks fluid permeability in at least amajority of the second regions but not in a majority of the firstregions.
 32. The method of claim 27 wherein the fluid pervious materialcomprises a cellular solid.
 33. The method of claim 27 wherein the fluidpervious material comprises nanowhiskers.
 34. The method of claim 27wherein the fluid pervious material comprises nanotubes.
 35. A method offorming a plurality of capacitors, comprising: depositing a firstmaterial over a substrate; depositing a fluid pervious material over thefirst material, the first material being selectively etchable relativeto the fluid pervious material; forming a plurality of spaced capacitorelectrode openings into the first and fluid pervious materials; forminga plurality of capacitor electrodes within the openings; after formingthe plurality of capacitor electrodes, flowing an etching fluid throughthe fluid pervious material effective to selectively etch first materialrelative to the fluid pervious material and effective to expose outerlateral sidewalls of the capacitor electrodes below the fluid perviousmaterial; and after the selective etch, depositing capacitor dielectricmaterial and capacitor electrode material over at least some of theouter lateral sidewalls below the fluid pervious material exposed by theselective etch.
 36. The method of claim 35 wherein the fluid perviousmaterial supports the capacitor electrodes upright during said selectiveetch.
 37. The method of claim 35 wherein the fluid impervious materialis inherently fluid pervious as-deposited.
 38. The method of claim 37comprising increasing degree of fluid permeability of at least some ofthe fluid pervious material from its as-deposited state.
 39. The methodof claim 35 comprising after forming the plurality of capacitorsincreasing, from as-deposited state, degree of fluid permeability offirst regions of fluid pervious material that are spaced farther fromthe sidewalls as compared to second regions of fluid pervious materialthat are spaced closer to the sidewalls.
 40. The method of claim 39wherein the capacitor dielectric material deposits onto the fluidpervious material, the capacitor dielectric material blocking fluidpermeability in at least a majority of the second regions but not in amajority of the first regions.
 41. The method of claim 35 wherein atleast a majority of fluid passageways within the fluid pervious materialhave average open cross sectional dimensions no greater than 400Angstroms.
 42. The method of claim 35 wherein at least a majority offluid passageways within the fluid pervious material have average opencross sectional dimensions no greater than 200 Angstroms.
 43. The methodof claim 35 wherein the fluid pervious material remains as part of afinished integrated circuitry construction incorporating the pluralityof capacitors.
 44. The method of claim 35 wherein the fluid perviousmaterial comprises a cellular solid.
 45. The method of claim 44 whereinthe cellular solid comprises a honeycomb.
 46. The method of claim 44wherein the cellular solid comprises a foam.
 47. The method of claim 35wherein the fluid pervious material is porous.
 48. The method of claim47 wherein the fluid pervious material is nanoporous.
 49. The method ofclaim 47 wherein the fluid pervious material is low k.
 50. The method ofclaim 35 wherein the fluid pervious material comprises nanowhiskers. 51.The method of claim 35 wherein the fluid pervious material comprisesnanotubes.
 52. The method of claim 35 wherein the depositing of thefluid pervious material comprises: providing nanowhiskers within aspin-on-glass solution; depositing the solution over the first material;and solidifying the solution into material comprising spin-on-glass andnanowhiskers.
 53. The method of claim 35 wherein the depositing of thefluid pervious material comprises: providing nanotubes within aspin-on-glass solution; depositing the solution over the first material;and solidifying the solution into material comprising spin-on-glass andnanotubes.
 54. A method of forming a plurality of capacitors,comprising: depositing a first material over a substrate; depositing afluid pervious material over the first material, the first materialbeing selectively etchable relative to the fluid pervious material;depositing a second material over the fluid pervious material, thesecond material being selectively etchable relative to the fluidpervious material; forming a plurality of spaced capacitor electrodeopenings into the first, fluid pervious, and second materials; forming aplurality of capacitor electrodes within the openings; after forming theplurality of capacitor electrodes, etching the second materialselectively relative to the fluid pervious material effective to exposeouter lateral sidewalls of the capacitor electrodes above the fluidpervious material; after etching the second material, flowing an etchingfluid through the fluid pervious material effective to selectively etchfirst material relative to the fluid pervious material and effective toexpose outer lateral sidewalls of the capacitor electrodes below thefluid pervious material; and after the selective etch of the firstmaterial, depositing capacitor dielectric material and capacitorelectrode material over at least some of the outer lateral sidewallsabove and below the fluid pervious material.
 55. The method of claim 54wherein the first and second materials are different.
 56. The method ofclaim 55 wherein the first and second materials comprise oxides.
 57. Themethod of claim 54 wherein the first and second materials are the same.58. The method of claim 54 wherein the second and first materials aselectively etched relative to the fluid pervious material using thesame etching fluid.
 59. The method of claim 54 wherein the second andfirst materials a selectively etched relative to the fluid perviousmaterial using the same etching fluid and in a single common, continuousetching step.
 60. The method of claim 54 wherein the fluid perviousmaterial supports the capacitor electrodes upright during said selectiveetch of the first material.
 61. The method of claim 54 wherein the fluidpervious material comprises a cellular solid.
 62. The method of claim 61wherein the cellular solid comprises a honeycomb.
 63. The method ofclaim 61 wherein the cellular solid comprises a foam.
 64. The method ofclaim 54 wherein the fluid pervious material is porous.
 65. The methodof claim 64 wherein the fluid pervious material is nanoporous.
 66. Themethod of claim 64 wherein the fluid pervious material is low k.
 67. Themethod of claim 54 wherein the fluid pervious material comprisesnanowhiskers.
 68. The method of claim 54 wherein the fluid perviousmaterial comprises nanotubes.
 69. The method of claim 54 wherein thedepositing of the fluid pervious material comprises: providingnanowhiskers within a spin-on-glass solution; depositing the solutionover the first material; and solidifying the solution into materialcomprising spin-on-glass and nanowhiskers.
 70. The method of claim 54wherein the depositing of the fluid pervious material comprises:providing nanotubes within a spin-on-glass solution; depositing thesolution over the first material; and solidifying the solution intomaterial comprising spin-on-glass and nanotubes.
 71. The method of claim54 wherein the fluid impervious material is inherently fluid perviousas-deposited.
 72. The method of claim 71 comprising increasing degree offluid permeability of at least some of the fluid pervious material fromits as-deposited state.
 73. The method of claim 54 comprising afterforming the plurality of capacitors increasing, from as-deposited state,degree of fluid permeability of first regions of fluid pervious materialthat are spaced farther from the sidewalls as compared to second regionsof fluid pervious material that are spaced closer to the sidewalls. 74.The method of claim 73 wherein the capacitor dielectric materialdeposits onto the fluid pervious material, the capacitor dielectricmaterial blocking fluid permeability in at least a majority of thesecond regions but not in a majority of the first regions.
 75. Themethod of claim 54 wherein at least a majority of fluid passagewayswithin the fluid pervious material have average open cross sectionaldimensions no greater than 400 Angstroms.
 76. The method of claim 54wherein at least a majority of fluid passageways within the fluidpervious material have average open cross sectional dimensions nogreater than 200 Angstroms.
 77. The method of claim 54 wherein the fluidpervious material remains as part of a finished integrated circuitryconstruction incorporating the plurality of capacitors.
 78. The methodof claim 54 wherein the second material is deposited on the fluidpervious material, the second material filling at least a portion of atleast some of fluid passageways of the fluid pervious material.
 79. Themethod of claim 78 wherein the second material fills all of at leastsome of the fluid passageways of the fluid pervious material.
 80. Themethod of claim 79 wherein the second material fills all of at least amajority of the fluid passageways of the fluid pervious material.
 81. Amethod of forming a plurality of capacitors comprising: depositing afirst material over a substrate; depositing a support materialcomprising at least one of nanotubes and nanowhiskers over the firstmaterial, the first material being selectively etchable relative to thesupport material; forming a plurality of spaced capacitor electrodeopenings into the first and support materials; forming a plurality ofcapacitor electrodes within the openings; after forming the plurality ofcapacitor electrodes, etching the first material selectively relative tothe support material effective to expose outer lateral sidewalls of thecapacitor electrodes below the support material and leaving at leastsome of said support material at least in part supporting said pluralityof capacitors; and after said etching, depositing capacitor dielectricmaterial and capacitor electrode material over at least some of theouter lateral sidewalls below the support material exposed by saidetching.
 82. A method of forming a plurality of capacitors, comprising:depositing a first material over a substrate; depositing a supportmaterial comprising at least one nanotubes and nanowhiskers over thefirst material, the first material being selectively etchable relativeto the support material; depositing a second material over the supportmaterial, the second material being selectively etchable relative to thesupport material; forming a plurality of spaced capacitor electrodeopenings into the first, support, and second materials; forming aplurality of capacitor electrodes within the openings; after forming theplurality of capacitor electrodes, etching the second materialselectively relative to the support material effective to expose outerlateral sidewalls of said plurality of capacitor electrodes above thesupport material; after etching the second material, etching the firstmaterial selectively relative to the support material effective toexpose outer lateral sidewalls of said plurality of capacitor electrodesbelow the support material and leaving at least some of said supportmaterial at least in part supporting said plurality of capacitorelectrodes; and after said etching of the first material, depositingcapacitor dielectric material and capacitor electrode material below thesupport material over at least some of the outer lateral sidewallsexposed by said etching of the first material.
 83. Integrated circuitrycomprising a plurality of spaced, elongated and upright capacitorelectrodes received over a substrate and supported at least in part by asidewall retaining structure, the sidewall retaining structurecomprising a fluid pervious material.
 84. Integrated circuitrycomprising a plurality of spaced, elongated and upright capacitorelectrodes received over a substrate and supported at least in part by asidewall retaining structure, the sidewall retaining structurecomprising at least one of nanowhiskers and nanotubes.